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1

Chemical mechanical polishing of PSG and BPSG dielectric films: the effect of phosphorus and boron concentration

Chi-Wen Liu, Bau-Tong Dai, Ching-Fa Yeh

Journal:

Thin Solid Films

Year:

1995

Language:

english

File:

PDF, 514 KB

english, 1995

2

Post cleaning of chemical mechanical polishing process

Chi-Wen Liu, Bau-Tong Dai, Ching-Fa Yeh

Journal:

Applied Surface Science

Year:

1996

Language:

english

File:

PDF, 281 KB

english, 1996

3

Post-Cu CMP cleaning for colloidal silica abrasive removal

Po-Lin Chen, Jyh-Herng Chen, Ming-Shih Tsai, Bau-Tong Dai, Ching-Fa Yeh

Journal:

Microelectronic Engineering

Year:

2004

Language:

english

File:

PDF, 1.96 MB

english, 2004

4

Simulation and experiment research on vaporizing liquid micro-thruster

Chia-Chin Chen, Chien-Wei Liu, Heng-Chuan Kan, Lee-Her Hu, Guey-Shin Chang, Ming-Chih Cheng, Bau-Tong Dai

Journal:

Sensors and Actuators A: Physical

Year:

2010

Language:

english

File:

PDF, 2.09 MB

english, 2010

5

Size effect of nanodiamonds on P3HT:PCBM heterojunction solar cells

Yu-Jen Hsiao, Te-Hua Fang, Liang-Wen Ji, Yu-Chao Lee, Bau-Tong Dai

Journal:

Electrochemistry Communications

Year:

2012

Language:

english

File:

PDF, 750 KB

english, 2012

6

Low cost high-efficiency amorphous silicon solar cells with improved light-soaking stability

Jung Y. Huang, Chien Y. Lin, Chang-Hong Shen, Jia-Min Shieh, Bau-Tong Dai

Journal:

Solar Energy Materials and Solar Cells

Year:

2012

Language:

english

File:

PDF, 776 KB

english, 2012

7

Investigations of pulse current electrodeposition for damascene copper metals

Chang, Shih-Chieh, Shieh, Jia-Min, Dai, Bau-Tong, Feng, Ming-Shiann

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2002

Language:

english

File:

PDF, 607 KB

english, 2002

8

Isopropyl Alcohol Sensors of CuO Nanotubes by Thermal Oxidation of Copper Films on Glass

Hsueh, Han-Ting, Chang, Shoou-Jinn, Hung, Fei-Yi, Weng, Wen-Yin, Chang, S. P., Hsueh, T. J., Hsu, Cheng-Liang, Dai, Bau-Tong

Journal:

IEEE Sensors Journal

Year:

2011

Language:

english

File:

PDF, 2.73 MB

english, 2011

9

[IEEE 2011 IEEE International Electron Devices Meeting (IEDM) - Washington, DC, USA (2011.12.5-2011.12.7)] 2011 International Electron Devices Meeting - Bifacial CIGS (11% efficiency)/Si solar cells by Cd-free and sodium-free green process integrated with CIGS TFTs

Yu-Jen Hsiao,, Hsueh, Ting-Jen, Jia-Min Shieh,, Yu-Ming Yeh,, Chien-Chih Wang,, Bau-Tong Dai,, Wen-Wei Hsu,, Jing-Yi Lin,, Shen, Chang-Hong, Liu, C. W., Chenming Hu,, Fu-Liang Yang,

Year:

2011

Language:

english

File:

PDF, 2.42 MB

english, 2011

10

[IEEE 2010 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2010.12.6-2010.12.8)] 2010 International Electron Devices Meeting - Novel 140°C hybrid thin film solar cell/transistor technology with 9.6% conversion efficiency and 1.1 cm2/V-s electron mobility for low-temperature substrates

Chang-Hong Shen,, Shieh, Jia-Min, Hao-Chung Kuo,, Huang, Jung Y., Wen-Hsien Huang,, Chih-Wei Hsu,, Yu-Hsin Lin,, Hung-Yu Chiu,, Huang-Yan Jhan,, Dai, Bau-Tong, Ching-Ting Lee,, Ci-Ling Pan,,

Year:

2010

Language:

english

File:

PDF, 2.60 MB

english, 2010

11

Inductively coupled plasma grown semiconductor films for low cost solar cells with improved light-soaking stability

Shen, Chang-Hong, Shieh, Jia-Min, Huang, Jung Y., Kuo, Hao-Chung, Hsu, Chih-Wei, Dai, Bau-Tong, Lee, Ching-Ting, Pan, Ci-Ling, Yang, Fu-Liang

Journal:

Applied Physics Letters

Year:

2011

Language:

english

File:

PDF, 778 KB

english, 2011

12

Microleveling mechanisms and applications of electropolishing on planarization of copper metallization

Chang, Shih-Chieh, Shieh, Jia-Min, Huang, Chih-Chang, Dai, Bau-Tong, Li, Ying-Hao, Feng, Ming-Shiann

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Year:

2002

Language:

english

File:

PDF, 888 KB

english, 2002

13

Reduction of Etch Pits of Electropolished Cu by Additives

Shieh, Jia-Min, Chang, Shih-Chieh, Wang, Ying-Lang, Dai, Bau-Tong, Cheng, Shih-Song, Ting, Jack

Journal:

Journal of The Electrochemical Society

Year:

2004

Language:

english

File:

PDF, 793 KB

english, 2004

14

Superpolishing for Planarizing Copper Damascene Interconnects

Chang, Shih-Chieh, Shieh, Jia-Min, Dai, Bau-Tong, Feng, Ming-Shiann, Li, Ying-Hao, Shih, C. H., Tsai, M. H., Shue, S. L., Liang, R. S., Wang, Ying-Lang

Journal:

Electrochemical and Solid-State Letters

Year:

2003

Language:

english

File:

PDF, 256 KB

english, 2003

15

A Microridge-like Structured c-Si Solar Cell Prepared by Reactive Ion Etching

Hsueh, Ting-Jen, Chen, Hsin-Yuan, Tsai, Tsung-Ying, Dai, Bau-Tong, Weng, Wen-Yin, Hsueh, Han-Ting, Shieh, Jia-Min

Journal:

Journal of The Electrochemical Society

Year:

2011

Language:

english

File:

PDF, 436 KB

english, 2011

16

SPIE Proceedings [SPIE Photomask and Next Generation Lithography Mask Technology XI - Yokohama, Japan (Wednesday 14 April 2004)] Photomask and Next-Generation Lithography Mask Technology XI - Nanofabrication of nanopattern and microdevices using contact/proximity lithography

Ting, Yung-Chiang, Shy, Shyi-Long, Lee, Ming-Chun, Dai, Bau-Tong, Tanabe, Hiroyoshi

Year:

2004

Language:

english

File:

PDF, 814 KB

english, 2004

17

SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Multilevel Interconnect Technology II - Novel two-step AI CMP process for overcoming pattern geometry effects

Tsai, Ming-Shih, Lin, Jias-Sheng, Dai, Bau-Tong, Graef, Mart, Patel, Divyesh N.

Year:

1998

Language:

english

File:

PDF, 1.48 MB

english, 1998

18

SPIE Proceedings [SPIE Microlithography 2000 - Santa Clara, CA (Sunday 27 February 2000)] Advances in Resist Technology and Processing XVII - Film characterization and evaluation of process performance for the modified electron beam resist

Ko, Fu-Hsiang, Ting, Jyh-Hua, Chou, Cheng-Tung, Hsiao, Li-Tung, Huang, Tiao-Yuan, Dai, Bau-Tong, Houlihan, Francis M.

Year:

2000

Language:

english

File:

PDF, 684 KB

english, 2000

19

Characterization of TiOxNy nanoparticles embedded in HfOxNy as charge trapping nodes for nonvolatile memory device applications

Chien-Wei Liu, Chin-Lung Cheng, Kuei-Shu Chang-Liao, Jin-Tsong Jeng, Bau-Tong Dai, Chen-Pang Tsai

Journal:

Microelectronic Engineering

Year:

2009

Language:

english

File:

PDF, 358 KB

english, 2009

20

Low-temperature self-assembly of copper phthalocyanine nanofibers

Shich-Chang Suen, Wha-Tzong Whang, Fu-Ju Hou, Bau-Tong Dai

Journal:

Organic Electronics

Year:

2006

Language:

english

File:

PDF, 767 KB

english, 2006

21

Growth enhancement and field emission characteristics of one-dimensional 3,4,9,10-perylenetetracarboxylic dianhydride nanostructures on pillared titanium substrate

Shich-Chang Suen, Wha-Tzong Whang, Fu-Ju Hou, Bau-Tong Dai

Journal:

Organic Electronics

Year:

2007

Language:

english

File:

PDF, 1.31 MB

english, 2007

22

Characterization of various alloying metal oxide nanoparticles embedded in HfOxNy as charge trapping nodes in nonvolatile memory devices

Chien-Wei Liu, Chin-Lung Cheng, Jin-Tsong Jeng, Bau-Tong Dai, Sung-Wei Huang

Journal:

Microelectronic Engineering

Year:

2008

Language:

english

File:

PDF, 486 KB

english, 2008

23

Photovoltaic characteristics of silicon nanowire arrays synthesized by vapor–liquid–solid process

Cheng Yung Kuo, Chie Gau, Bau Tong Dai

Journal:

Solar Energy Materials and Solar Cells

Year:

2011

Language:

english

File:

PDF, 604 KB

english, 2011

24

Characterization of CoxNiyO hybrid metal oxide nanoparticles as charge trapping nodes in nonvolatile memory devices

Chin-Lung Cheng, Chien-Wei Liu, Kuei-Shu Chang-Liao, Ping-Hung Tsai, Jin-Tsong Jeng, Sung-Wei Huang, Bau-Tong Dai

Journal:

Solid-State Electronics

Year:

2008

Language:

english

File:

PDF, 664 KB

english, 2008

25

p-Cu2O-shell/n-TiO2-nanowire-core heterostucture photodiodes

Tsung-Ying Tsai, Shoou-Jinn Chang, Ting-Jen Hsueh, Han-Ting Hsueh, Wen-Yin Weng, Cheng-Liang Hsu, Bau-Tong Dai

Journal:

Nanoscale Research Letters

Year:

2011

Language:

english

File:

PDF, 736 KB

english, 2011

26

Fast programming metal-gate Si quantum dot nonvolatile memory using green nanosecond laser spike annealing

Lien, Yu-Chung, Shieh, Jia-Min, Huang, Wen-Hsien, Tu, Cheng-Hui, Wang, Chieh, Shen, Chang-Hong, Dai, Bau-Tong, Pan, Ci-Ling, Hu, Chenming, Yang, Fu-Liang

Journal:

Applied Physics Letters

Year:

2012

Language:

english

File:

PDF, 1.26 MB

english, 2012

27

Crystalline-Si photovoltaic devices with ZnO nanowires

Ting-Jen Hsueh, Siou-Yi Lin, Wen-Yin Weng, Cheng-Liang Hsu, Tsung-Ying Tsai, Bau-Tong Dai, Jia-Min Shieh

Journal:

Solar Energy Materials and Solar Cells

Year:

2012

Language:

english

File:

PDF, 915 KB

english, 2012

28

Effects of mechanical characteristics on the chemical-mechanical polishing of dielectric thin films

Wei-Tsu Tseng, Chi-Wen Liu, Bau-Tong Dai, Ching-Fa Yeh

Journal:

Thin Solid Films

Year:

1996

Language:

english

File:

PDF, 446 KB

english, 1996

29

Rapid fabrication of high quality self-assembled nanometer gold particles by spin coating method

Fu-Ken Liu, Yu-Cheng Chang, Fu-Hsiang Ko, Tieh-Chi Chu, Bau-Tong Dai

Journal:

Microelectronic Engineering

Year:

2003

Language:

english

File:

PDF, 618 KB

english, 2003

30

The application of electrochemical metrologies for investigating chemical mechanical polishing of Al with a Ti barrier layer

Shao-Yu Chiu, Ying-Lang Wang, Chuan-Pu Liu, Jin-Kun Lan, Chyung Ay, Ming-Shiann Feng, Ming-Shih Tsai, Bau-Tong Dai

Journal:

Materials Chemistry and Physics

Year:

2003

Language:

english

File:

PDF, 320 KB

english, 2003

31

Sol–gel synthesis and the luminescent properties of CaNb2O6 phosphor powders

Yu-Jen Hsiao, Chien-Wei Liu, Bau-Tong Dai, Yen-Hwei Chang

Journal:

Journal of Alloys and Compounds

Year:

2009

Language:

english

File:

PDF, 595 KB

english, 2009

32

Near-infrared silicon quantum dots metal-oxide-semiconductor field-effect transistor photodetector

Shieh, Jia-Min, Yu, Wen-Chien, Huang, Jung Y., Wang, Chao-Kei, Dai, Bau-Tong, Jhan, Huang-Yan, Hsu, Chih-Wei, Kuo, Hao-Chung, Yang, Fu-Liang, Pan, Ci-Ling

Journal:

Applied Physics Letters

Year:

2009

Language:

english

File:

PDF, 599 KB

english, 2009

33

[IEEE 2007 International Semiconductor Device Research Symposium - College Park, MD, USA (2007.12.12-2007.12.14)] 2007 International Semiconductor Device Research Symposium - Characterization of coxniyo bimetallic oxide nanoparticles as charge trapping nodes in nonvolatile memory devices

Chin-Lung Cheng,, Kuei-Shu Chang-Liao,, Ping-Hung Tsai,, Chien-Wei Liu,, Jin-Tsong Jeng,, Sung-Wei Huang,, Bau-Tong Dai,

Year:

2007

Language:

english

File:

PDF, 369 KB

english, 2007

34

Near-infrared femtosecond laser-induced crystallization of amorphous silicon

Shieh, Jia-Min, Chen, Zun-Hao, Dai, Bau-Tong, Wang, Yi-Chao, Zaitsev, Alexei, Pan, Ci-Ling

Journal:

Applied Physics Letters

Year:

2004

Language:

english

File:

PDF, 561 KB

english, 2004

35

Synthesis of Nanometer-Sized Poly (methyl methacrylate) Polymer Network by Gold Nanoparticle Template

Liu, Fu-Ken, Hsieh, Shang-Yu, Ko, Fu-Hsiang, Chu, Tieh-Chi, Dai, Bau-Tong

Journal:

Japanese Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 173 KB

english, 2003

36

Fabrication of thin film transistors by chemical mechanical polished polycrystalline silicon films

Chun-Yen Chang,, Hsiao-Yi Lin,, Tan Fu Lei,, Juing-Yi Cheng,, Liang-Po Chen,, Bau-Tong Dai,

Journal:

IEEE Electron Device Letters

Year:

1996

Language:

english

File:

PDF, 479 KB

english, 1996

37

Microwave Heating for the Preparation of Nanometer Gold Particles

Liu, Fu-Ken, Ker, Chu-Jung, Chang, Yu-Cheng, Ko, Fu-Hsiang, Chu, Tieh-Chi, Dai, Bau-Tong

Journal:

Japanese Journal of Applied Physics

Year:

2003

Language:

english

File:

PDF, 677 KB

english, 2003

38

[IEEE 2011 IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Kaohsiung, Taiwan (2011.02.20-2011.02.23)] 2011 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Study of silicon nitride film embedded with silicon quantum dots

Li, Pei Ling, Gau, Chie, Dai, Bau Tong, Liu, Chien Wei

Year:

2011

Language:

english

File:

PDF, 378 KB

english, 2011

39

[IEEE International Symposium on VLSI Technology Systems and Applications - Taipei, Taiwan (8-10 June 1999)] 1999 International Symposium on VLSI Technology, Systems, and Applications. Proceedings of Technical Papers. (Cat. No.99TH8453) - CMP of polyimide for low-k dielectric application in ULSI

Ya-Li Tai,, Bau-Tong Dai,, Ming-Shih Tsai,, I-Chung Tung,, Ming-Shiann Feng,

Year:

1999

Language:

english

File:

PDF, 356 KB

english, 1999

40

[IEEE International Electron Devices and Materials Symposium - Hsinchu, Taiwan (12-15 July, 1994)] International Electron Devices and Materials Symposium - Planarizing dielectrics for VLSI technology

Chi-Wen Liu,, Bau-Tong Dai,, Ching-Fa Yeh,, Chien-Hung Liu,, Po-Tsun Wang,

Year:

1994

Language:

english

File:

PDF, 265 KB

english, 1994

41

Investigation of inductively coupled plasma gate oxide on low temperature polycrystalline-silicon TFTs

Chang-Ho Tseng,, Ting-Kuo Chang,, Fang-Tsun Chu,, Jia-Min Shieh,, Bau-Tong Dai,, Huang-Chung Cheng,, Chin, A.

Journal:

IEEE Electron Device Letters

Year:

2002

Language:

english

File:

PDF, 216 KB

english, 2002

42

[IEEE 2007 7th IEEE Conference on Nanotechnology (IEEE-NANO) - Hong Kong, China (2007.08.2-2007.08.5)] 2007 7th IEEE Conference on Nanotechnology (IEEE NANO) - Selective growth of high purity single-walled carbon nanotubes network from alcohol

Shiuan-Hua Shiau,, Chien-Wei Liu,, Chie Gau,, Chin-Lung Cheng,, Sung-Wei Huang,, Bau-Tong Dai,

Year:

2007

Language:

english

File:

PDF, 2.42 MB

english, 2007

43

UV–Visible Light-Trapping Structure of Loosely Packed Submicrometer Silica Sphere for Amorphous Silicon Solar Cells

Huang, Wen-Hsien, Shieh, Jia-Min, Pan, Fu-Ming, Shen, Chang-Hong, Lien, Yu-Chung, Tsai, Min-An, Kuo, Hao-Chung, Dai, Bau-Tong, Yang, Fu-Liang

Journal:

IEEE Electron Device Letters

Year:

2012

Language:

english

File:

PDF, 460 KB

english, 2012

44

A novel two-step etching to suppress the charging damages during metal etching employing helicon wave plasma

Huang-Chung Cheng,, Lin, W., Tzong-Kuei Kang,, Yean-Chyi Perng,, Bau-Tong Dai,

Journal:

IEEE Electron Device Letters

Year:

1998

Language:

english

File:

PDF, 35 KB

english, 1998

45

[IEEE 2007 7th IEEE Conference on Nanotechnology (IEEE-NANO) - Hong Kong, China (2007.08.2-2007.08.5)] 2007 7th IEEE Conference on Nanotechnology (IEEE NANO) - Synthesis of well aligned silicon nanowire arrays by reflow of photoresist techniques

Chien-Wei Liu,, Cheng-Yung Kuo,, Chuan-Po Wang,, Chie Gau,, Shiuan-Hua Shiau,, Bau-Tong Dai,

Year:

2007

Language:

english

File:

PDF, 1.76 MB

english, 2007

46

A novel technology to reduce the antenna charging effects during polysilicon gate electron-cyclotron-resonance etching

Huang-Chung Cheng,, Tzong-Kuei Kang,, Tzun-Kun Ku,, Bau-Tong Dai,, Liang-Po Chen,

Journal:

IEEE Electron Device Letters

Year:

1996

Language:

english

File:

PDF, 315 KB

english, 1996

47

Ultralow copper drift in inductively coupled plasma silicon carbide dielectrics

Shieh, Jia-Min, Tsai, Kou-Chiang, Dai, Bau-Tong

Journal:

Applied Physics Letters

Year:

2003

Language:

english

File:

PDF, 300 KB

english, 2003

48

[IEEE 2005 Conference on Lasers and Electro-Optics (CLEO) - Baltimore, MD, USA (2005.05.27-2005.05.27)] (CLEO). Conference on Lasers and Electro-Optics, 2005. - Near-infrared femtosecond laser-processed thin-film transistor

Zun-Hao Chen,, Jia-Min Shieh,, Bau-Tong Dai,, Yi-Chao Wang,, Ci-Ling Pan,

Year:

2005

Language:

english

File:

PDF, 1.22 MB

english, 2005

49

[IEEE 5th IEEE Conference on Nanotechnology, 2005. - Nagoya, Japan (July 11-15, 2005)] 5th IEEE Conference on Nanotechnology, 2005. - Organic nanofiber of copper phthalocyanine

Shieh-Chang Suen,, Wha-Tzong Whang,, Kuo-Rong Huang,, Tzong-Che Tsai,, Bau-Tong dai,

Year:

2005

Language:

english

File:

PDF, 2.36 MB

english, 2005

50

Bimetallic oxide nanoparticles Co[sub x]Mo[sub y]O as charge trapping layer for nonvolatile memory device applications

Liu, Chien-Wei, Cheng, Chin-Lung, Huang, Sung-Wei, Jeng, Jin-Tsong, Shiau, Shiuan-Hua, Dai, Bau-Tong

Journal:

Applied Physics Letters

Year:

2007

Language:

english

File:

PDF, 418 KB

english, 2007